Hitachi S-4800 provides both: high-resolution topographic contrast secondary electron (SE) imaging and atomic number contrast backscattered electron (BSE) imaging.
The electron source is a cold FE gun producing high brightness with little energy spread. Under optimal working conditions, it can magnify images upwards of 800,000 times and resolve features to 1 nanometer. It uses an electron beam to image the surface of solid materials.
In-column Upper ExB detector In-column Top Detector, In-Chamber lower ET detector 4+1 segment semiconductor (PD-BSE) detector.Contact: Valentina Korchnoy (0, Hitachi S-4800 is a field emission scanning electron microscope (FE-SEM), capable of high resolution imaging and specimen topography study from nanometers to millimeters. Magnification ranges from 20 X to 1,000,000X. Resolution: 0.8 nm resolution at 15 kV at 4.0 mm WD 1.1 nm resolution at 1.0 kV landing voltage at 1.5 mm WD. 6 inch sample chamber integrated LN2 cryo trap. Cold field-emission gun with "Mild Flashing" technology. High-resolution topographic contrast (Se) and atomic number contrast (BSe) imaging of biological and non-biological samples in both room temperature and cryo modes. Particularly applicable to imaging of immunogold labeled individual cells and bacteria, analysis of semiconductor thin films, polymers, hydrogels, etc. Ultra-low landing voltage imaging of beam sensitive or charge prone samples. High-resolution topographic contrast (Se) and atomic number contrast (BSe) imaging of biological and non-biological samples in both room temperature and cryo modes. Gun / column Ion pumps X 3, + Non- Evaporative Getter (NEG).Ĭharge Suppression Scan: imaging mode helps reduce charge artifact. Vacuum system: Specimen chamber Turbo + scroll dry pump. Cryo Mode: X/Y movement is ~ +/- 9 mm Z: 1.5 - 40 mm Tilt: 30 at Z=8mm or greater 15 at 5 mm 0 at 1.5 mm. Sample chamber: 6 inch includes an integrated LN2 cryo trap. A 4+1 segment retractable below-lens semiconductor type BSE detector. A chamber mounted Everhart-Thornley detector. An in-column Top detector which receives high-angle elastically scattered electrons (BSE) for high resolution atomic number contrast at short working distances. In-column Upper ExB detector with lens-integrated control electrode to provide either pure secondary (SE) or variable percentages of SE and inelastically scattered electrons (BSE). Magnification: ranges from 100X to 1,000,000X in High Magnification Mode 20X-2000X in Low Magnification Mode. (Beam Deceleration Mode variable retarding bias, provides landing voltage range from 0.01 to 2kV (0.01 - 1 kV in 10V steps 1.0 - 2.0 kV in 100V steps) Landing voltage range is 30 kV to 0.01 kV. The source brightness (A / cm2/sr) exceeds that of any prior Hitachi SEM. The newly designed Cold Field Emission (CFE) gun: complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability. 
Hitachi SU 8230 is a Field Emission Gun Scanning Electron Microscope (FEGSEM) capable of 1.1 nm resolution at 1.5 mm working distance at 1.0 kV landing voltage, and 0.8 nm resolution at 15 kV at 4.
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